[JRSJ Vol.20, No.3, pp.102-112]
Recently, techniques of arranging micrometer-sized objects with high repeatability under a scanning electron microscope (SEM) are required to construct micro-devices. Since micro-objects tend to adhere to other objects mainly by electrostatic force, manipulation techniques by adhesive force are often taken in basic researches in which micro-objects are studied. These techniques, however, still do not achieve the desired repeatability under the real condition because many of these are used just for the empirical effectiveness and some even include the trial-and-error ways. Thus, in this paper, we analyzed micro-object operation theoretically by considering \textit{adhesion} and \textit{rolling-resistance} factor in the kinematic system consisting of a sphere, a needle-shaped tool, and a substrate. In this analysis, we clarified that it is possible to control the fracture of the contact interfaces of the system by determining the \textit{tool-loading angle} reasonably. Based on the analysis, we also proposed the reasonable way of pick and place operation of a micro-sphere under an SEM.
Key Words: Adhesion・ Rolling-resistance・ Fracture・ Micro-object・ SEM・ Pick・ Place
[JRSJ Vol.20, No.3, pp.102-112]